Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Study of Diamond Like Carbon Deposition Using Capacitively Coupled RF-PECVD

    New search for: Ali, N.
    New search for: Ahmed, W.
    New search for: Fan, Q.
    New search for: Rego, C.
    New search for: Taylor, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Study of Diamond Like Carbon Deposition Using Capacitively Coupled RF-PECVD

    New search for: Ali, N.
    New search for: Ahmed, W.
    New search for: Fan, Q.
    New search for: Rego, C.
    New search for: Taylor, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study of Diamond Like Carbon Deposition Using Capacitively Coupled RF-PECVD

    New search for: Ali, N.
    New search for: Ahmed, W.
    New search for: Fan, Q.
    New search for: Rego, C.
    New search for: Taylor, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Study of Diamond Like Carbon Deposition Using Capacitively Coupled RF-PECVD

    Contributors:

    Ali, N. (author) / Ahmed, W. (author) / Fan, Q. (author) / Rego, C. (author) / Taylor, H. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SOFIA- ; 7 ; 14-23

    Publication date:

    1999-01-01

    Size:

    10 pages

    ISSN:

    0861-9786

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.112

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Deposition of Ti-containing diamond-like carbon (DLC) films by PECVD technique

    Caschera, D. / Federici, F. / Kaciulis, S. et al. | British Library Online Contents | 2007

    Properties of fluorinated amorphous diamond like carbon films by PECVD

    Yu, G. Q. / Tay, B. K. / Sun, Z. et al. | British Library Online Contents | 2003

    Hydrogenated diamond-like carbon film deposited on UHMWPE by RF-PECVD

    Shi, X. / Wang, Q. / Xu, L. et al. | British Library Online Contents | 2009

    Structural characteristics of diamond-like nanocomposite films grown by PECVD

    Yang, W. J. / Choa, Y. H. / Sekino, T. et al. | British Library Online Contents | 2003

    Optical and Structural Properties of Nitrogenated Diamond-Like Carbon Films Prepared by r.f. PECVD

    Rusop, M. / Abdullah, S. / Podder, J. et al. | British Library Online Contents | 2006

    Back to top