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Mechanisms for Enhanced Formation of the C45 Phase of Titanium Silicide Ultra-Large-Scale Integration Contacts

Harper, J. M. E. / Cabral, C. / Lavoie, C.

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Mechanisms for Enhanced Formation of the C45 Phase of Titanium Silicide Ultra-Large-Scale Integration Contacts

Harper, J. M. E. / Cabral, C. / Lavoie, C.

Mechanisms for Enhanced Formation of the C45 Phase of Titanium Silicide Ultra-Large-Scale Integration Contacts

Harper, J. M. E. / Cabral, C. / Lavoie, C.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Mechanisms for Enhanced Formation of the C45 Phase of Titanium Silicide Ultra-Large-Scale Integration Contacts

Contributors:

Harper, J. M. E. (author) / Cabral, C. (author) / Lavoie, C. (author)

Published in:

ANNUAL REVIEW OF MATERIALS SCIENCE ; 30 ; 523-543

Publication date:

2000-01-01

Size:

21 pages

ISSN:

0084-6600

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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