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Ultrathin Diffusion Barriers/Liners for Gigascale Copper Metallization

Kaloyeros, A. E. / Eisenbraun, E.

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Ultrathin Diffusion Barriers/Liners for Gigascale Copper Metallization

Kaloyeros, A. E. / Eisenbraun, E.

Ultrathin Diffusion Barriers/Liners for Gigascale Copper Metallization

Kaloyeros, A. E. / Eisenbraun, E.

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Order at Subito €

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Document information

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Document information

Title:

Ultrathin Diffusion Barriers/Liners for Gigascale Copper Metallization

Contributors:

Kaloyeros, A. E. (author) / Eisenbraun, E. (author)

Published in:

ANNUAL REVIEW OF MATERIALS SCIENCE ; 30 ; 363-385

Publication date:

2000-01-01

Size:

23 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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