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An Approach to MEMS Sensor Array Packaging

Soucy, J. / Haley, J. / Marinis, T.

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An Approach to MEMS Sensor Array Packaging

Soucy, J. / Haley, J. / Marinis, T.

An Approach to MEMS Sensor Array Packaging

Soucy, J. / Haley, J. / Marinis, T.

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Document information

Title:

An Approach to MEMS Sensor Array Packaging

Contributors:

Soucy, J. (author) / Haley, J. (author) / Marinis, T. (author)

Published in:

ADVANCING MICROELECTRONICS ; 27 ; 16-18

Publication date:

2000-01-01

Size:

3 pages

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.381

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