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Photo-induced deposition and characterization of variable bandgap a-SiN:H alloy films
Photo-induced deposition and characterization of variable bandgap a-SiN:H alloy films
Photo-induced deposition and characterization of variable bandgap a-SiN:H alloy films
Banerji, N. (author) / Serra, J. (author) / Chiussi, S. (author) / Leon, B. (author) / Perez-Amor, M. (author)
APPLIED SURFACE SCIENCE ; 168 ; 52-56
2000-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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