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Optical characterization of ns-SiN:H in the infrared by spectroscopic ellipsometry
Optical characterization of ns-SiN:H in the infrared by spectroscopic ellipsometry
Optical characterization of ns-SiN:H in the infrared by spectroscopic ellipsometry
Sancho-Parramon, J. (author) / Bosch, S. (author) / Canillas, A. (author)
APPLIED SURFACE SCIENCE ; 253 ; 65-69
2006-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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