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    Investigation of local order of a-SiN:H films deposited by hot wire chemical vapour deposition (HWCVD)

    New search for: Swain, B. P.
    New search for: Swain, B. S.
    New search for: Hwang, N. M.

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    Investigation of local order of a-SiN:H films deposited by hot wire chemical vapour deposition (HWCVD)

    New search for: Swain, B. P.
    New search for: Swain, B. S.
    New search for: Hwang, N. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Investigation of local order of a-SiN:H films deposited by hot wire chemical vapour deposition (HWCVD)

    New search for: Swain, B. P.
    New search for: Swain, B. S.
    New search for: Hwang, N. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Investigation of local order of a-SiN:H films deposited by hot wire chemical vapour deposition (HWCVD)

    Contributors:

    Swain, B. P. (author) / Swain, B. S. (author) / Hwang, N. M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 255 ; 2557-2560

    Publication date:

    2008-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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