A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Experiments for 3-D structuring of thick resists by gray tone lithography
Experiments for 3-D structuring of thick resists by gray tone lithography
Experiments for 3-D structuring of thick resists by gray tone lithography
Dumbravescu, N. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 569-573
2000-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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