How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates: Fid-Bau Portal

How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates

Chassagne, T. / Ferro, G. / Gourbeyre, C. / Le Berre, M. / Barbier, D. / Monteil, Y.

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How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates

Chassagne, T. / Ferro, G. / Gourbeyre, C. / Le Berre, M. / Barbier, D. / Monteil, Y.

How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates

Chassagne, T. / Ferro, G. / Gourbeyre, C. / Le Berre, M. / Barbier, D. / Monteil, Y.

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Check availability in my library

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Document information

Title:

How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates

Contributors:

Chassagne, T. (author) / Ferro, G. (author) / Gourbeyre, C. (author) / Le Berre, M. (author) / Barbier, D. (author) / Monteil, Y. (author)

Published in:

MATERIALS SCIENCE FORUM ; 353/356 ; 155-158

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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