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Doping of Silicon Carbide by Ion Implantation

Svensson, B. G. / Hallen, A. / Linnarsson, M. K. / Kuznetsov, A. Y. / Janson, M. S. / Aberg, D. / Osterman, J. / Persson, P. O. A. / Hultman, L. / Storasta, L.

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Doping of Silicon Carbide by Ion Implantation

Svensson, B. G. / Hallen, A. / Linnarsson, M. K. / Kuznetsov, A. Y. / Janson, M. S. / Aberg, D. / Osterman, J. / Persson, P. O. A. / Hultman, L. / Storasta, L.

Doping of Silicon Carbide by Ion Implantation

Svensson, B. G. / Hallen, A. / Linnarsson, M. K. / Kuznetsov, A. Y. / Janson, M. S. / Aberg, D. / Osterman, J. / Persson, P. O. A. / Hultman, L. / Storasta, L.

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Title:

Doping of Silicon Carbide by Ion Implantation

Contributors:

Svensson, B. G. (author) / Hallen, A. (author) / Linnarsson, M. K. (author) / Kuznetsov, A. Y. (author) / Janson, M. S. (author) / Aberg, D. (author) / Osterman, J. (author) / Persson, P. O. A. (author) / Hultman, L. (author) / Storasta, L. (author)

Published in:

MATERIALS SCIENCE FORUM ; 353/356 ; 549-554

Publication date:

2001-01-01

Size:

6 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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