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Techniques for Depth Profiling of Dopants in 4H-SiC
Techniques for Depth Profiling of Dopants in 4H-SiC
Techniques for Depth Profiling of Dopants in 4H-SiC
Osterman, J. (author) / Hallen, A. (author) / Anand, S. (author) / Linnarsson, M. K. (author) / Andersson, H. (author) / Aberg, D. (author) / Panknin, D. (author) / Skorupa, W. (author)
MATERIALS SCIENCE FORUM ; 353/356 ; 559-562
2001-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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