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Techniques for Depth Profiling of Dopants in 4H-SiC

Osterman, J. / Hallen, A. / Anand, S. / Linnarsson, M. K. / Andersson, H. / Aberg, D. / Panknin, D. / Skorupa, W.

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Techniques for Depth Profiling of Dopants in 4H-SiC

Osterman, J. / Hallen, A. / Anand, S. / Linnarsson, M. K. / Andersson, H. / Aberg, D. / Panknin, D. / Skorupa, W.

Techniques for Depth Profiling of Dopants in 4H-SiC

Osterman, J. / Hallen, A. / Anand, S. / Linnarsson, M. K. / Andersson, H. / Aberg, D. / Panknin, D. / Skorupa, W.

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Check availability in my library

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Title:

Techniques for Depth Profiling of Dopants in 4H-SiC

Contributors:

Osterman, J. (author) / Hallen, A. (author) / Anand, S. (author) / Linnarsson, M. K. (author) / Andersson, H. (author) / Aberg, D. (author) / Panknin, D. (author) / Skorupa, W. (author)

Published in:

MATERIALS SCIENCE FORUM ; 353/356 ; 559-562

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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