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Backside-SIMS profiling of dopants in thin Hf silicate film

Hongo, C. / Takenaka, M. / Kamimuta, Y. / Suzuki, M. / Koyama, M.

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Backside-SIMS profiling of dopants in thin Hf silicate film

Hongo, C. / Takenaka, M. / Kamimuta, Y. / Suzuki, M. / Koyama, M.

Backside-SIMS profiling of dopants in thin Hf silicate film

Hongo, C. / Takenaka, M. / Kamimuta, Y. / Suzuki, M. / Koyama, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Backside-SIMS profiling of dopants in thin Hf silicate film

Contributors:

Hongo, C. (author) / Takenaka, M. (author) / Kamimuta, Y. (author) / Suzuki, M. (author) / Koyama, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 231/232 ; 594-597

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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