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Backside-SIMS profiling of dopants in thin Hf silicate film
Backside-SIMS profiling of dopants in thin Hf silicate film
Backside-SIMS profiling of dopants in thin Hf silicate film
Hongo, C. (author) / Takenaka, M. (author) / Kamimuta, Y. (author) / Suzuki, M. (author) / Koyama, M. (author)
APPLIED SURFACE SCIENCE ; 231/232 ; 594-597
2004-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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