High Electrical Activation of Aluminium and Nitrogen Implanted in 6H-SiC at Room Temperature by RF Annealing: Fid-Bau Portal

High Electrical Activation of Aluminium and Nitrogen Implanted in 6H-SiC at Room Temperature by RF Annealing

Lazar, M. / Ottaviani, L. / Locatelli, M. L. / Raynaud, C. / Planson, D. / Morvan, E. / Godignon, P. / Skorupa, W. / Chante, J. P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

High Electrical Activation of Aluminium and Nitrogen Implanted in 6H-SiC at Room Temperature by RF Annealing

Lazar, M. / Ottaviani, L. / Locatelli, M. L. / Raynaud, C. / Planson, D. / Morvan, E. / Godignon, P. / Skorupa, W. / Chante, J. P.

High Electrical Activation of Aluminium and Nitrogen Implanted in 6H-SiC at Room Temperature by RF Annealing

Lazar, M. / Ottaviani, L. / Locatelli, M. L. / Raynaud, C. / Planson, D. / Morvan, E. / Godignon, P. / Skorupa, W. / Chante, J. P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

High Electrical Activation of Aluminium and Nitrogen Implanted in 6H-SiC at Room Temperature by RF Annealing

Contributors:

Lazar, M. (author) / Ottaviani, L. (author) / Locatelli, M. L. (author) / Raynaud, C. (author) / Planson, D. (author) / Morvan, E. (author) / Godignon, P. (author) / Skorupa, W. (author) / Chante, J. P. (author)

Published in:

MATERIALS SCIENCE FORUM ; 353/356 ; 571-574

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Tanaka, Y. / Tanoue, H. / Arai, K. | British Library Online Contents | 2003

Electrical activation of nitrogen heavily implanted 3C-SiC(100)

Li, F. / Sharma, Y. / Shah, V. et al. | British Library Online Contents | 2015

Electrical activation of nitrogen heavily implanted 3C-SiC(100)

Li, Fan / Sharma, Yogesh / Shah, Vishal et al. | British Library Online Contents | 2015

High temperature annealing of Er implanted GaN

Alves, E. / Monteiro, T. / Soares, J. et al. | British Library Online Contents | 2001

Impact of Annealing Temperature Ramps on the Electrical Activation of N^+ and P^+ Co-Implanted SiC Layers

Blanque, S. / Perez, R. / Mestres, N. et al. | British Library Online Contents | 2006