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Electrical activation of nitrogen heavily implanted 3C-SiC(100)

Li, F. / Sharma, Y. / Shah, V. / Jennings, M. / Pérez-Tomás, A. / Myronov, M. / Fisher, C. / Leadley, D. / Mawby, P.

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Electrical activation of nitrogen heavily implanted 3C-SiC(100)

Li, F. / Sharma, Y. / Shah, V. / Jennings, M. / Pérez-Tomás, A. / Myronov, M. / Fisher, C. / Leadley, D. / Mawby, P.

Electrical activation of nitrogen heavily implanted 3C-SiC(100)

Li, F. / Sharma, Y. / Shah, V. / Jennings, M. / Pérez-Tomás, A. / Myronov, M. / Fisher, C. / Leadley, D. / Mawby, P.

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Title:

Electrical activation of nitrogen heavily implanted 3C-SiC(100)

Contributors:

Li, F. (author) / Sharma, Y. (author) / Shah, V. (author) / Jennings, M. (author) / Pérez-Tomás, A. (author) / Myronov, M. (author) / Fisher, C. (author) / Leadley, D. (author) / Mawby, P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 353 ; 958-963

Publication date:

2015-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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