Thermal decomposition of copper nitride thin films and dots formation by electron beam writing: Fid-Bau Portal

Thermal decomposition of copper nitride thin films and dots formation by electron beam writing

Nosaka, T. / Yoshitake, M. / Okamoto, A. / Ogawa, S. / Nakayama, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Thermal decomposition of copper nitride thin films and dots formation by electron beam writing

Nosaka, T. / Yoshitake, M. / Okamoto, A. / Ogawa, S. / Nakayama, Y.

Thermal decomposition of copper nitride thin films and dots formation by electron beam writing

Nosaka, T. / Yoshitake, M. / Okamoto, A. / Ogawa, S. / Nakayama, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Thermal decomposition of copper nitride thin films and dots formation by electron beam writing

Contributors:

Nosaka, T. (author) / Yoshitake, M. (author) / Okamoto, A. (author) / Ogawa, S. (author) / Nakayama, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 169-170 ; 358-361

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Hellgren, N. / Lin, N. / Broitman, E. et al. | British Library Online Contents | 2001

Ion beam modification of plasmonic titanium nitride thin films

Zhang, L. a. / Liu, H. n. / Suo, X. x. et al. | British Library Online Contents | 2017

Effect of oxygen inclusion on microstructure and thermal stability of copper nitride thin films

Du, Y. / Huang, R. / Song, R. et al. | British Library Online Contents | 2007

Characterisation of nitride thin films by electron backscattered diffraction

Trager-Cowan, C. / Manson-Smith, S. K. / Cowan, D. A. et al. | British Library Online Contents | 2001

Study of Deposition of Aluminum Nitride Thin Films by Hollow Cathode Electron Beam Vapor Deposition Method

Mu, Z.X. / Mu, X.D. / Wang, C. et al. | British Library Online Contents | 2010