Improved thermal stability of ultrathin silicon oxynitride layer due to nitrogen incorporation at the interface

Prabhakaran, K. / Kobayashi, Y. / Ogino, T. | British Library Online Contents | 1998

Quantitative depth profiling of nitrogen in ultrathin oxynitride film with low energy SIMS

Shon, H. K. / Kang, H. J. / Hong, T. E. et al. | British Library Online Contents | 2003

The growth chemistry and interfacial properties of silicon oxynitride and metal oxide ultrathin films on silicon

Lu, H. C. / Gusev, E. / Yasuda, N. et al. | British Library Online Contents | 2000

Formation and properties of nitrogen-rich strontium silicon oxynitride glasses

Sharafat, A. / Forslund, B. / Grins, J. et al. | British Library Online Contents | 2009

Interfacial chemistry and structures of ultrathin Si oxynitride films

Oshima, M. / Kimura, K. / Ono, K. et al. | British Library Online Contents | 2003