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    Interfacial chemistry and structures of ultrathin Si oxynitride films

    New search for: Oshima, M.
    New search for: Kimura, K.
    New search for: Ono, K.
    New search for: Horiba, K.
    New search for: Nakamura, K.
    New search for: Kumigashira, H.
    New search for: Oh, J. H.
    New search for: Niwa, M.
    New search for: Usuda, K.
    New search for: Hirashita, N.

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    Interfacial chemistry and structures of ultrathin Si oxynitride films

    New search for: Oshima, M.
    New search for: Kimura, K.
    New search for: Ono, K.
    New search for: Horiba, K.
    New search for: Nakamura, K.
    New search for: Kumigashira, H.
    New search for: Oh, J. H.
    New search for: Niwa, M.
    New search for: Usuda, K.
    New search for: Hirashita, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Interfacial chemistry and structures of ultrathin Si oxynitride films

    New search for: Oshima, M.
    New search for: Kimura, K.
    New search for: Ono, K.
    New search for: Horiba, K.
    New search for: Nakamura, K.
    New search for: Kumigashira, H.
    New search for: Oh, J. H.
    New search for: Niwa, M.
    New search for: Usuda, K.
    New search for: Hirashita, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Interfacial chemistry and structures of ultrathin Si oxynitride films

    Contributors:

    Oshima, M. (author) / Kimura, K. (author) / Ono, K. (author) / Horiba, K. (author) / Nakamura, K. (author) / Kumigashira, H. (author) / Oh, J. H. (author) / Niwa, M. (author) / Usuda, K. (author) / Hirashita, N. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 216 ; 291-295

    Publication date:

    2003-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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