In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates: Fid-Bau Portal

In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates

Ghica, C. / Nistor, L. / Bender, H. / Steegen, A. / Lauwers, A. / Maex, K. / Van Landuyt, J.

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In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates

Ghica, C. / Nistor, L. / Bender, H. / Steegen, A. / Lauwers, A. / Maex, K. / Van Landuyt, J.

In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates

Ghica, C. / Nistor, L. / Bender, H. / Steegen, A. / Lauwers, A. / Maex, K. / Van Landuyt, J.

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Document information

Title:

In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates

Contributors:

Ghica, C. (author) / Nistor, L. (author) / Bender, H. (author) / Steegen, A. (author) / Lauwers, A. (author) / Maex, K. (author) / Van Landuyt, J. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 701-708

Publication date:

2001-01-01

Size:

8 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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