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X-ray reflectivity of silicon on insulator wafers

Eymery, J. / Rieutord, F. / Fournel, F. / Buttard, D. / Moriceau, H.

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X-ray reflectivity of silicon on insulator wafers

Eymery, J. / Rieutord, F. / Fournel, F. / Buttard, D. / Moriceau, H.

X-ray reflectivity of silicon on insulator wafers

Eymery, J. / Rieutord, F. / Fournel, F. / Buttard, D. / Moriceau, H.

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Check availability in my library

Order at Subito €

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Document information

Title:

X-ray reflectivity of silicon on insulator wafers

Contributors:

Eymery, J. (author) / Rieutord, F. (author) / Fournel, F. (author) / Buttard, D. (author) / Moriceau, H. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 31-33

Publication date:

2001-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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