Gettering in silicon-on-insulator wafers with polysilicon layer

Savin, H. / Yli-Koski, M. / Haarahiltunen, A. et al. | British Library Online Contents | 2009

Electrical activation of B and As implants in Silicon On Insulator (SOI) wafers

Ottaviano, L. / Italia, M. / Mannino, G. et al. | British Library Online Contents | 2004

Integrity of functional self-assembled monolayers on hydrogen-terminated silicon-on-insulator wafers

Tian, F. / Ni, C. / Teplyakov, A. V. | British Library Online Contents | 2010

Quantum confinement effects in Si quantum well and dot structures fabricated from ultrathin silicon-on-insulator wafers

Tabe, M. / Kumezawa, M. / Ishikawa, Y. et al. | British Library Online Contents | 2001

Comparison of high temperature annealed Czochralski silicon wafers and epitaxial wafers

Graef, D. / Lambert, U. / Brohl, M. et al. | British Library Online Contents | 1996