Electrical activation of B and As implants in Silicon On Insulator (SOI) wafers: Fid-Bau Portal

Electrical activation of B and As implants in Silicon On Insulator (SOI) wafers

Ottaviano, L. / Italia, M. / Mannino, G. / Privitera, V. / Herden, M. / Feudel, T.

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Electrical activation of B and As implants in Silicon On Insulator (SOI) wafers

Ottaviano, L. / Italia, M. / Mannino, G. / Privitera, V. / Herden, M. / Feudel, T.

Electrical activation of B and As implants in Silicon On Insulator (SOI) wafers

Ottaviano, L. / Italia, M. / Mannino, G. / Privitera, V. / Herden, M. / Feudel, T.

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Check availability in my library

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Document information

Title:

Electrical activation of B and As implants in Silicon On Insulator (SOI) wafers

Contributors:

Ottaviano, L. (author) / Italia, M. (author) / Mannino, G. (author) / Privitera, V. (author) / Herden, M. (author) / Feudel, T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 260-263

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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