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Ion implantation into GaN

Kucheyev, S. O. / Williams, J. S. / Pearton, S. J.

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Ion implantation into GaN

Kucheyev, S. O. / Williams, J. S. / Pearton, S. J.

Ion implantation into GaN

Kucheyev, S. O. / Williams, J. S. / Pearton, S. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Ion implantation into GaN

Contributors:

Kucheyev, S. O. (author) / Williams, J. S. (author) / Pearton, S. J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- R REPORTS- ; 33 ; 51-108

Publication date:

2001-01-01

Size:

58 pages

ISSN:

0927-796X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 530

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