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    Integrated MEMS Technologies

    New search for: Franke, A. E.
    New search for: King, T.-J.
    New search for: Howe, R. T.

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    Integrated MEMS Technologies

    New search for: Franke, A. E.
    New search for: King, T.-J.
    New search for: Howe, R. T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Integrated MEMS Technologies

    New search for: Franke, A. E.
    New search for: King, T.-J.
    New search for: Howe, R. T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Integrated MEMS Technologies

    Contributors:

    Franke, A. E. (author) / King, T.-J. (author) / Howe, R. T. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 26 ; 291-295

    Publication date:

    2001-01-01

    Size:

    5 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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