A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Novel Patterning Technologies for Ceramic MEMS
Novel Patterning Technologies for Ceramic MEMS
Novel Patterning Technologies for Ceramic MEMS
Wilhelm, S. (author) / Lacrotte, Y. (author) / Kay, R.W. (author) / Desmulliez, M.P.Y. (author)
ADVANCING MICROELECTRONICS ; 39 ; 18-23
2012-01-01
6 pages
Article (Journal)
English
DDC:
621.381
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