Control of Al-implantation doping in 4H-SiC: Fid-Bau Portal

Control of Al-implantation doping in 4H-SiC

Pernot, J. / Camassel, J. / Contreras, S. / Robert, J. L. / Bluet, J. M. / Michaud, J. F. / Billon, T.

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Control of Al-implantation doping in 4H-SiC

Pernot, J. / Camassel, J. / Contreras, S. / Robert, J. L. / Bluet, J. M. / Michaud, J. F. / Billon, T.

Control of Al-implantation doping in 4H-SiC

Pernot, J. / Camassel, J. / Contreras, S. / Robert, J. L. / Bluet, J. M. / Michaud, J. F. / Billon, T.

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Title:

Control of Al-implantation doping in 4H-SiC

Contributors:

Pernot, J. (author) / Camassel, J. (author) / Contreras, S. (author) / Robert, J. L. (author) / Bluet, J. M. (author) / Michaud, J. F. (author) / Billon, T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 80 ; 362 - 365

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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