Evaluation of reactive ion etching processes for fabrication of integrated GaAs/AlGaAs optoelectronic devices: Fid-Bau Portal

Evaluation of reactive ion etching processes for fabrication of integrated GaAs/AlGaAs optoelectronic devices

Aperathitis, E. / Cengher, D. / Kayambaki, M. / Androulidaki, M. / Deligeorgis, G. / Tsagaraki, K. / Hatzopoulos, Z. / Georgakilas, A.

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Evaluation of reactive ion etching processes for fabrication of integrated GaAs/AlGaAs optoelectronic devices

Aperathitis, E. / Cengher, D. / Kayambaki, M. / Androulidaki, M. / Deligeorgis, G. / Tsagaraki, K. / Hatzopoulos, Z. / Georgakilas, A.

Evaluation of reactive ion etching processes for fabrication of integrated GaAs/AlGaAs optoelectronic devices

Aperathitis, E. / Cengher, D. / Kayambaki, M. / Androulidaki, M. / Deligeorgis, G. / Tsagaraki, K. / Hatzopoulos, Z. / Georgakilas, A.

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Title:

Evaluation of reactive ion etching processes for fabrication of integrated GaAs/AlGaAs optoelectronic devices

Contributors:

Aperathitis, E. (author) / Cengher, D. (author) / Kayambaki, M. (author) / Androulidaki, M. (author) / Deligeorgis, G. (author) / Tsagaraki, K. (author) / Hatzopoulos, Z. (author) / Georgakilas, A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 80 ; 77 - 80

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Lin, C. S. / Fang, Y. K. / Chen, S. F. et al. | British Library Online Contents | 2004

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