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Properties of amorphous Si-rich silicon nitride prepared by rf-magnetron sputtering
Properties of amorphous Si-rich silicon nitride prepared by rf-magnetron sputtering
Properties of amorphous Si-rich silicon nitride prepared by rf-magnetron sputtering
Vetter, M. (author) / Rojahn, M. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 71 ; 321 - 326
2000-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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