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Technical Note: Excimer laser–induced etching of semiconductors and metals

Peyre, J .–L. / Riviere, D. / Vannier, C. / Villela, G.

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Technical Note: Excimer laser–induced etching of semiconductors and metals

Peyre, J .–L. / Riviere, D. / Vannier, C. / Villela, G.

Technical Note: Excimer laser–induced etching of semiconductors and metals

Peyre, J .–L. / Riviere, D. / Vannier, C. / Villela, G.

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Check availability in my library

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Document information

Title:

Technical Note: Excimer laser–induced etching of semiconductors and metals

Contributors:

Peyre, J .–L. (author) / Riviere, D. (author) / Vannier, C. (author) / Villela, G. (author)

Published in:

International journal of material & product technology ; 5 ; 301-310

Publication date:

1990-01-01

Size:

10 pages

ISSN:

0268-1900

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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