Excimer-laser doping of spin-on dopant in silicon

Wong, Y. W. / Yang, X. Q. / Chan, P. W. et al. | British Library Online Contents | 1993

Excimer laser-induced doping of crystalline silicon carbide films

Krishnan, S. / D'Couto, G. C. / Chaudhry, M. I. et al. | British Library Online Contents | 1995

Technical Note: Excimer laser–induced etching of semiconductors and metals

Peyre, J .–L. / Riviere, D. / Vannier, C. et al. | British Library Online Contents | 1990

UV-Excimer Laser Ablation Patterning of II-VI Compound Semiconductors

Key, P. H. / Sands, D. / Wagner, F. X. | British Library Online Contents | 1995

Surface processing of CdTe compound semiconductor by excimer laser doping

Hatanaka, Y. / Niraula, M. / Aoki, Y. et al. | British Library Online Contents | 1999