Damage profiles and damage annealing behavior in Al0.168Ga0.348In0.484P/GaAs implanted with 200 keV Zn+ ions: Fid-Bau Portal

Damage profiles and damage annealing behavior in Al0.168Ga0.348In0.484P/GaAs implanted with 200 keV Zn+ ions

Liu, P. / Liu, X. / Xia, Y. / Li, Y. / Xu, H. / Wang, L. / Zhang, J.

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Damage profiles and damage annealing behavior in Al0.168Ga0.348In0.484P/GaAs implanted with 200 keV Zn+ ions

Liu, P. / Liu, X. / Xia, Y. / Li, Y. / Xu, H. / Wang, L. / Zhang, J.

Damage profiles and damage annealing behavior in Al0.168Ga0.348In0.484P/GaAs implanted with 200 keV Zn+ ions

Liu, P. / Liu, X. / Xia, Y. / Li, Y. / Xu, H. / Wang, L. / Zhang, J.

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Title:

Damage profiles and damage annealing behavior in Al0.168Ga0.348In0.484P/GaAs implanted with 200 keV Zn+ ions

Contributors:

Liu, P. (author) / Liu, X. (author) / Xia, Y. (author) / Li, Y. (author) / Xu, H. (author) / Wang, L. (author) / Zhang, J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 86 ; 189 - 194

Publication date:

2001-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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