Reduction of surface roughening due to copper contamination prior to ultra-thin gate oxidation

Peterson, C. A. / Vermeire, B. / Sarid, D. et al. | British Library Online Contents | 2001

Evaluation of 4H-SiC Carbon Face Gate Oxide Reliability

Fronheiser, J.A. / Chatterjee, A. / Grossner, U. et al. | British Library Online Contents | 2011

Reliability study of ultra-thin gate oxides on strained-Si/SiGe MOS structures

Varzgar, J. B. / Kanoun, M. / Uppal, S. et al. | British Library Online Contents | 2006

Impact of post-nitridation annealing on ultra-thin gate oxide performance

He, Y. / Zhang, G. | British Library Online Contents | 2009

On ultra-thin oxide/Si and very-thin oxide/Si structures prepared by wet chemical process

Pincik, E. / Kobayashi, H. / Rusnak, J. et al. | British Library Online Contents | 2010