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Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide
Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide
Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide
Hishida, Y. (author) / Watanabe, M. (author) / Nakashima, K. (author) / Eryu, O. (author)
MATERIALS SCIENCE FORUM ; 338/342 ; 873-876
2000-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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