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Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Hishida, Y. / Watanabe, M. / Nakashima, K. / Eryu, O.

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Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Hishida, Y. / Watanabe, M. / Nakashima, K. / Eryu, O.

Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Hishida, Y. / Watanabe, M. / Nakashima, K. / Eryu, O.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Contributors:

Hishida, Y. (author) / Watanabe, M. (author) / Nakashima, K. (author) / Eryu, O. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 873-876

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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