Tert-butylamine and allylamine as reductive nitrogen sources in atomic layer deposition of TaN thin films: Fid-Bau Portal

Tert-butylamine and allylamine as reductive nitrogen sources in atomic layer deposition of TaN thin films

Alen, P. / Juppo, M. / Ritala, M. / Leskela, M. / Sajavaara, T. / Keinonen, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Tert-butylamine and allylamine as reductive nitrogen sources in atomic layer deposition of TaN thin films

Alen, P. / Juppo, M. / Ritala, M. / Leskela, M. / Sajavaara, T. / Keinonen, J.

Tert-butylamine and allylamine as reductive nitrogen sources in atomic layer deposition of TaN thin films

Alen, P. / Juppo, M. / Ritala, M. / Leskela, M. / Sajavaara, T. / Keinonen, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Tert-butylamine and allylamine as reductive nitrogen sources in atomic layer deposition of TaN thin films

Contributors:

Alen, P. (author) / Juppo, M. (author) / Ritala, M. (author) / Leskela, M. (author) / Sajavaara, T. (author) / Keinonen, J. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 17 ; 107-114

Publication date:

2002-01-01

Size:

8 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Bazanov, A. G. / Timofeev, A. F. / Zubritskaya, N. G. | British Library Online Contents | 2009

Perovskite Thin Films via Atomic Layer Deposition

Sutherland, B. R. / Hoogland, S. / Adachi, M. M. et al. | British Library Online Contents | 2015

Atomic layer deposition of PbZrO3 thin films

Harjuoja, J. / Vayrynen, S. / Putkonen, M. et al. | British Library Online Contents | 2007

SrCoO3-d thin films by atomic layer deposition

Ahvenniemi, E. / Matvejeff, M. / Karppinen, M. | British Library Online Contents | 2014

Atomic layer deposition of hafnium and zirconium silicate thin films

Vainonen-Ahlgren, E. / Tois, E. / Ahlgren, T. et al. | British Library Online Contents | 2003