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Laser annealing of SiOx thin films

Gallas, B. / Kao, C. C. / Fisson, S. / Vuye, G. / Rivory, J. / Bernard, Y. / Belouet, C.

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Laser annealing of SiOx thin films

Gallas, B. / Kao, C. C. / Fisson, S. / Vuye, G. / Rivory, J. / Bernard, Y. / Belouet, C.

Laser annealing of SiOx thin films

Gallas, B. / Kao, C. C. / Fisson, S. / Vuye, G. / Rivory, J. / Bernard, Y. / Belouet, C.

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Document information

Title:

Laser annealing of SiOx thin films

Contributors:

Gallas, B. (author) / Kao, C. C. (author) / Fisson, S. (author) / Vuye, G. (author) / Rivory, J. (author) / Bernard, Y. (author) / Belouet, C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 185 ; 317-320

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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