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    Influence of laser annealing on SiOx films properties

    New search for: Gavrylyuk, O. O.
    New search for: Semchuk, O. Y.
    New search for: Steblova, O. V.
    New search for: Evtukh, A. A.
    New search for: Fedorenko, L. L.
    New search for: Bratus, O. L.
    New search for: Zlobin, S. O.
    New search for: Karlsteen, M.

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    Influence of laser annealing on SiOx films properties

    New search for: Gavrylyuk, O. O.
    New search for: Semchuk, O. Y.
    New search for: Steblova, O. V.
    New search for: Evtukh, A. A.
    New search for: Fedorenko, L. L.
    New search for: Bratus, O. L.
    New search for: Zlobin, S. O.
    New search for: Karlsteen, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of laser annealing on SiOx films properties

    New search for: Gavrylyuk, O. O.
    New search for: Semchuk, O. Y.
    New search for: Steblova, O. V.
    New search for: Evtukh, A. A.
    New search for: Fedorenko, L. L.
    New search for: Bratus, O. L.
    New search for: Zlobin, S. O.
    New search for: Karlsteen, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Influence of laser annealing on SiOx films properties

    Contributors:

    Gavrylyuk, O. O. (author) / Semchuk, O. Y. (author) / Steblova, O. V. (author) / Evtukh, A. A. (author) / Fedorenko, L. L. (author) / Bratus, O. L. (author) / Zlobin, S. O. (author) / Karlsteen, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 336 ; 217-221

    Publication date:

    2015-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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