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Influence of laser annealing on SiOx films properties
Influence of laser annealing on SiOx films properties
Influence of laser annealing on SiOx films properties
Gavrylyuk, O. O. (author) / Semchuk, O. Y. (author) / Steblova, O. V. (author) / Evtukh, A. A. (author) / Fedorenko, L. L. (author) / Bratus, O. L. (author) / Zlobin, S. O. (author) / Karlsteen, M. (author)
APPLIED SURFACE SCIENCE ; 336 ; 217-221
2015-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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