Wetting behaviour of carbon nitride nanostructures grown by plasma enhanced chemical vapour deposition technique

Ahmad Kamal, S. A. / Ritikos, R. / Abdul Rahman, S. | British Library Online Contents | 2015

Stress in low-temperature plasma enhanced chemical vapour deposited silicon nitride thin films

Martyniuk, M. / Antoszewski, J. / Musca, C. A. et al. | British Library Online Contents | 2006

Low-pressure chemical vapour deposition growth of epitaxial silicon selective to silicon nitride

Lloyd, N. S. / Bonar, J. M. | British Library Online Contents | 2002

Chemical vapour deposition of silicon nitride in a microwave plasma assisted reactor

Monteiro, O. R. / Wang, Z. / Brown, I. G. | British Library Online Contents | 1996

Growth of oriented aluminium nitride films on silicon by chemical vapour deposition

Khan, A. H. / Odeh, M. F. / Meese, J. M. et al. | British Library Online Contents | 1994