Characterization of defects and whole wafer uniformity of annealed undoped semi-insulating InP wafers: Fid-Bau Portal

Characterization of defects and whole wafer uniformity of annealed undoped semi-insulating InP wafers

Zhao, Y. / Sun, N. / Dong, H. / Jiao, J. / Zhao, J. / Sun, T. / Lin, L.

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Characterization of defects and whole wafer uniformity of annealed undoped semi-insulating InP wafers

Zhao, Y. / Sun, N. / Dong, H. / Jiao, J. / Zhao, J. / Sun, T. / Lin, L.

Characterization of defects and whole wafer uniformity of annealed undoped semi-insulating InP wafers

Zhao, Y. / Sun, N. / Dong, H. / Jiao, J. / Zhao, J. / Sun, T. / Lin, L.

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Check availability in my library

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Document information

Title:

Characterization of defects and whole wafer uniformity of annealed undoped semi-insulating InP wafers

Contributors:

Zhao, Y. (author) / Sun, N. (author) / Dong, H. (author) / Jiao, J. (author) / Zhao, J. (author) / Sun, T. (author) / Lin, L. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 91-92 ; 521 - 524

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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