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Megarad-Resistant 10nm Gate Dielectrics

F. L. Terry / R. J. Aucoin / M. L. Naiman

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Megarad-Resistant 10nm Gate Dielectrics

F. L. Terry / R. J. Aucoin / M. L. Naiman

Megarad-Resistant 10nm Gate Dielectrics

F. L. Terry / R. J. Aucoin / M. L. Naiman

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Check availability in my library

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Document information

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Document information

Title:

Megarad-Resistant 10nm Gate Dielectrics

Contributors:

F. L. Terry (author) / R. J. Aucoin (author) / M. L. Naiman (author)

Publication date:

1981

Size:

4 pages

Type of media:

Report

Type of material:

No indication

Language:

English

Keywords:

Circuits , Radiation hardening , Gates(Circuits) , Silicon dioxide , Dielectrics , Nitrides , Electron irradiation , Reprints

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