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Investigation of interface in silicon-on-insulator by fractal analysis

Liu, X. H. / Chen, J. / Chen, M. / Wang, X.

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Investigation of interface in silicon-on-insulator by fractal analysis

Liu, X. H. / Chen, J. / Chen, M. / Wang, X.

Investigation of interface in silicon-on-insulator by fractal analysis

Liu, X. H. / Chen, J. / Chen, M. / Wang, X.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Investigation of interface in silicon-on-insulator by fractal analysis

Contributors:

Liu, X. H. (author) / Chen, J. (author) / Chen, M. (author) / Wang, X. (author)

Published in:

APPLIED SURFACE SCIENCE ; 187 ; 187-191

Publication date:

2002-01-01

Size:

5 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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