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Investigation of Si-SiO~2 interface properties for bonded silicon-on-insulator

Yeh, C.-F. / Kao, H.-W. / Chang, B.-S. / Chang, K.-L.

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Investigation of Si-SiO~2 interface properties for bonded silicon-on-insulator

Yeh, C.-F. / Kao, H.-W. / Chang, B.-S. / Chang, K.-L.

Investigation of Si-SiO~2 interface properties for bonded silicon-on-insulator

Yeh, C.-F. / Kao, H.-W. / Chang, B.-S. / Chang, K.-L.

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Document information

Title:

Investigation of Si-SiO~2 interface properties for bonded silicon-on-insulator

Contributors:

Yeh, C.-F. (author) / Kao, H.-W. (author) / Chang, B.-S. (author) / Chang, K.-L. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 12 ; 1506

Publication date:

1993-01-01

Size:

1506 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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