Defect annealing in ion implanted silicon carbide: Fid-Bau Portal

Defect annealing in ion implanted silicon carbide

Calcagno, L. / Grimaldi, M. G. / Musumeci, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Defect annealing in ion implanted silicon carbide

Calcagno, L. / Grimaldi, M. G. / Musumeci, P.

Defect annealing in ion implanted silicon carbide

Calcagno, L. / Grimaldi, M. G. / Musumeci, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Defect annealing in ion implanted silicon carbide

Contributors:

Calcagno, L. (author) / Grimaldi, M. G. (author) / Musumeci, P. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 1727-1733

Publication date:

1997-01-01

Size:

7 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Heft, A. / Wendler, E. / Bachmann, T. et al. | British Library Online Contents | 1995

Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Hishida, Y. / Watanabe, M. / Nakashima, K. et al. | British Library Online Contents | 2000

Effect of Hot Isostatic Press Annealing for Ion-Implanted Silicon Carbide

Hirabayashi, Y. / Furuya, M. / Hirai, K. et al. | British Library Online Contents | 1998

Laser annealing of Al implanted silicon carbide: Structural and optical characterization

Boutopoulos, C. / Terzis, P. / Zergioti, I. et al. | British Library Online Contents | 2007

Oxidation of ion implanted silicon carbide

Makhtari, A. / Raineri, V. / La Via, F. et al. | British Library Online Contents | 2001