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Oxidation of ion implanted silicon carbide

Makhtari, A. / Raineri, V. / La Via, F. / Franzo, G. / Frisina, F. / Calcagno, L.

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Oxidation of ion implanted silicon carbide

Makhtari, A. / Raineri, V. / La Via, F. / Franzo, G. / Frisina, F. / Calcagno, L.

Oxidation of ion implanted silicon carbide

Makhtari, A. / Raineri, V. / La Via, F. / Franzo, G. / Frisina, F. / Calcagno, L.

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Order at Subito €

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Document information

Title:

Oxidation of ion implanted silicon carbide

Contributors:

Makhtari, A. (author) / Raineri, V. (author) / La Via, F. (author) / Franzo, G. (author) / Frisina, F. (author) / Calcagno, L. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 345-349

Publication date:

2001-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Calcagno, L. / Grimaldi, M. G. / Musumeci, P. | British Library Online Contents | 1997

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Morvan, E. / Monserrat, J. / Rebollo, J. et al. | British Library Online Contents | 1998

Range Distributions of Implanted Ions in Silicon Carbide

Janson, M. S. / Linnarsson, M. K. / Hallen, A. et al. | British Library Online Contents | 2002

A modified oxidation procedure for ion-implanted silicon carbide devices annealed at low temperatures

Capano, M. A. | British Library Online Contents | 2001

Structural and chemical characteristics and oxidation behaviour of chromium-implanted single crystal silicon carbide

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