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Phosphorus Ion Implantation into 4H-SiC (0001) and (11&unknown;20)
Phosphorus Ion Implantation into 4H-SiC (0001) and (11&unknown;20)
Phosphorus Ion Implantation into 4H-SiC (0001) and (11&unknown;20)
Negoro, Y. (author) / Miyamoto, N. (author) / Kimoto, T. (author) / Matsunami, H. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 783-786
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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