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    Influence of the Crystalline Quality of Epitaxial Layers on Inversion Channel Mobility in 4H-SiC MOSFETs

    New search for: Kojima, K.
    New search for: Ohno, T.
    New search for: Suzuki, S.
    New search for: Senzaki, J.
    New search for: Harada, S.
    New search for: Fukuda, K.
    New search for: Kushibe, M.
    New search for: Masahara, K.
    New search for: Ishida, Y.
    New search for: Takahashi, T.

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    Influence of the Crystalline Quality of Epitaxial Layers on Inversion Channel Mobility in 4H-SiC MOSFETs

    New search for: Kojima, K.
    New search for: Ohno, T.
    New search for: Suzuki, S.
    New search for: Senzaki, J.
    New search for: Harada, S.
    New search for: Fukuda, K.
    New search for: Kushibe, M.
    New search for: Masahara, K.
    New search for: Ishida, Y.
    New search for: Takahashi, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of the Crystalline Quality of Epitaxial Layers on Inversion Channel Mobility in 4H-SiC MOSFETs

    New search for: Kojima, K.
    New search for: Ohno, T.
    New search for: Suzuki, S.
    New search for: Senzaki, J.
    New search for: Harada, S.
    New search for: Fukuda, K.
    New search for: Kushibe, M.
    New search for: Masahara, K.
    New search for: Ishida, Y.
    New search for: Takahashi, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Influence of the Crystalline Quality of Epitaxial Layers on Inversion Channel Mobility in 4H-SiC MOSFETs

    Contributors:

    Kojima, K. (author) / Ohno, T. (author) / Suzuki, S. (author) / Senzaki, J. (author) / Harada, S. (author) / Fukuda, K. (author) / Kushibe, M. (author) / Masahara, K. (author) / Ishida, Y. (author) / Takahashi, T. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 389/393 ; 1053-1056

    Publication date:

    2002-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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