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SiC Vertical DACFET (Vertical Delta-Doped Accumulation Channel MOSFET)

Kusumoto, O. / Yokogawa, T. / Yamashita, K. / Takahashi, K. / Kitabatake, M. / Uchida, M. / Miyanaga, R.

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SiC Vertical DACFET (Vertical Delta-Doped Accumulation Channel MOSFET)

Kusumoto, O. / Yokogawa, T. / Yamashita, K. / Takahashi, K. / Kitabatake, M. / Uchida, M. / Miyanaga, R.

SiC Vertical DACFET (Vertical Delta-Doped Accumulation Channel MOSFET)

Kusumoto, O. / Yokogawa, T. / Yamashita, K. / Takahashi, K. / Kitabatake, M. / Uchida, M. / Miyanaga, R.

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Title:

SiC Vertical DACFET (Vertical Delta-Doped Accumulation Channel MOSFET)

Contributors:

Kusumoto, O. (author) / Yokogawa, T. (author) / Yamashita, K. (author) / Takahashi, K. (author) / Kitabatake, M. (author) / Uchida, M. (author) / Miyanaga, R. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 1211-1214

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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