Growth of Epitaxial (SiC)~x(AlN)~1~-~x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition: Fid-Bau Portal

Growth of Epitaxial (SiC)~x(AlN)~1~-~x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition

Tungasmita, S. / Persson, P. O. A. / Seppanen, T. / Hultman, L. / Birch, J.

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Growth of Epitaxial (SiC)~x(AlN)~1~-~x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition

Tungasmita, S. / Persson, P. O. A. / Seppanen, T. / Hultman, L. / Birch, J.

Growth of Epitaxial (SiC)~x(AlN)~1~-~x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition

Tungasmita, S. / Persson, P. O. A. / Seppanen, T. / Hultman, L. / Birch, J.

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Title:

Growth of Epitaxial (SiC)~x(AlN)~1~-~x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition

Contributors:

Tungasmita, S. (author) / Persson, P. O. A. (author) / Seppanen, T. (author) / Hultman, L. (author) / Birch, J. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 1481-1484

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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