A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Evolution of step-terrace structure at Si-SiO2 interface in SIMOX substrate during annealing
Evolution of step-terrace structure at Si-SiO2 interface in SIMOX substrate during annealing
Evolution of step-terrace structure at Si-SiO2 interface in SIMOX substrate during annealing
Ishiyama, T. (author) / Nagase, M. (author) / Omura, Y. (author)
APPLIED SURFACE SCIENCE ; 190 ; 16-19
2002-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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