Formation of AlxGa1-xAs periodic array of micro-hexagonal pillars and air holes by selective area MOVPE: Fid-Bau Portal

Formation of AlxGa1-xAs periodic array of micro-hexagonal pillars and air holes by selective area MOVPE

Takeda, J. / Akabori, M. / Motohisa, J. / Fukui, T.

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Formation of AlxGa1-xAs periodic array of micro-hexagonal pillars and air holes by selective area MOVPE

Takeda, J. / Akabori, M. / Motohisa, J. / Fukui, T.

Formation of AlxGa1-xAs periodic array of micro-hexagonal pillars and air holes by selective area MOVPE

Takeda, J. / Akabori, M. / Motohisa, J. / Fukui, T.

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Check availability in my library

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Document information

Title:

Formation of AlxGa1-xAs periodic array of micro-hexagonal pillars and air holes by selective area MOVPE

Contributors:

Takeda, J. (author) / Akabori, M. (author) / Motohisa, J. (author) / Fukui, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 190 ; 236-241

Publication date:

2002-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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