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Formation of AlxGa1-xAs periodic array of micro-hexagonal pillars and air holes by selective area MOVPE
Formation of AlxGa1-xAs periodic array of micro-hexagonal pillars and air holes by selective area MOVPE
Formation of AlxGa1-xAs periodic array of micro-hexagonal pillars and air holes by selective area MOVPE
Takeda, J. (Autor:in) / Akabori, M. (Autor:in) / Motohisa, J. (Autor:in) / Fukui, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 190 ; 236-241
01.01.2002
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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