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    Hydrogen Implantation Effects on the Electrical and Optical Properties of Metal Nitride Thin Films

    New search for: Ishikawa, T.
    New search for: Masuda, M.
    New search for: Hayashi, Y.

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    Hydrogen Implantation Effects on the Electrical and Optical Properties of Metal Nitride Thin Films

    New search for: Ishikawa, T.
    New search for: Masuda, M.
    New search for: Hayashi, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Hydrogen Implantation Effects on the Electrical and Optical Properties of Metal Nitride Thin Films

    New search for: Ishikawa, T.
    New search for: Masuda, M.
    New search for: Hayashi, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Hydrogen Implantation Effects on the Electrical and Optical Properties of Metal Nitride Thin Films

    Contributors:

    Ishikawa, T. (author) / Masuda, M. (author) / Hayashi, Y. (author)

    Published in:

    MATERIALS TRANSACTIONS ; 43 ; 1138-1141

    Publication date:

    2002-01-01

    Size:

    4 pages

    ISSN:

    1345-9678

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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